Publication:

A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

Date

2011
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorSwerts, Johan
dc.contributor.authorFavia, Paola
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBender, Hugo
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTielens, Hilde
dc.contributor.authorBrijs, Bert
dc.contributor.authorKaczer, Ben
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKim, Min-Soo
dc.contributor.authorAltimime, Laith
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2021-10-19T17:31:52Z
dc.date.available2021-10-19T17:31:52Z
dc.date.issued2011
dc.identifier.issn0031-8965
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19602
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201026710/abstract
dc.source.beginpage1920
dc.source.endpage1924
dc.source.issue8
dc.source.journalPhysica Status Solidi A
dc.source.volume208
dc.title

A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles