Publication:

DUV lithography for 0.35 μm CMOS processing

Date

1995

Journal article

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Files

912.pdf 202.96 KB

Author(s)

Van Driessche, Veerle

;

Goethals, Mieke

;

Op de Beeck, Maaike

;

;

Van den hove, Luc

Journal

Microelectronic Engineering

Statistics

2042 since deposited on 2021-09-29

Acq. date: 2026-10-12