Publication:

Metal oxide EUV photoresist performance for N7 relevant patterns and processes

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

34343.pdf 2.52 MB

Author(s)

Stowers, Jason
;
Anderson, Jeremy
;
Cardineau, Brian
;
Clark, Benjamin
;
De Schepper, Peter  
;
Edson, Joseph
;
Greer, Michael  
;
Jiang, Kai
;
Kocsis, Michael  
;
Meyers, Stephen
;
Telecky, Alan
;
Grenville, Andrew
;
De Simone, Danilo  
;
Gillijns, Werner  
;
Vandenberghe, Geert  

Journal

Abstract

Description

Metrics

Views

1991 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-09

Citations

Metrics

Views

1991 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-09

Citations