Publication:

Pupil optimization for after etch defectivity: what imaging metrics matter?

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2600967
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 850.52 KB

Author(s)

Frommhold, Andreas  
;
Franke, Joern-Holger
;
Maslow, Mark J.
;
Nafus, Kathleen  
;
Rispens, Gijsbert  

Journal

Proceedings of SPIE

Abstract

Description

Statistics

Downloads

555 since deposited on 2021-12-02
Acq. date: 2026-06-22

Views

1661 since deposited on 2021-12-02
Acq. date: 2026-06-22

Citations

Statistics

Downloads

555 since deposited on 2021-12-02
Acq. date: 2026-06-22

Views

1661 since deposited on 2021-12-02
Acq. date: 2026-06-22

Citations