Publication:

Pupil optimization for after etch defectivity: what imaging metrics matter?

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2600967
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Author(s)

Frommhold, Andreas  
;
Franke, Joern-Holger
;
Maslow, Mark J.
;
Nafus, Kathleen  
;
Rispens, Gijsbert  

Journal

Proceedings of SPIE

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