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Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LK

Date

2008
Proceedings Paper
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dc.contributor.authorDemuynck, Steven
dc.contributor.authorKim, Hongun
dc.contributor.authorHuffman, Craig
dc.contributor.authorDarnon, Maxime
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVersluijs, Janko
dc.contributor.authorClaes, Martine
dc.contributor.authorVereecke, Guy
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.date.accessioned2021-10-17T06:53:09Z
dc.date.available2021-10-17T06:53:09Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13654
dc.source.conference40th International Confernece on Solid STate Devices and Materials
dc.source.conferencedate22/09/2008
dc.source.conferencelocationTsukuba Japan
dc.title

Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LK

dc.typeProceedings paper
dspace.entity.typePublication
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