Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
OrbiSIMS depth profiling of semiconductor materials-Useful yield and depth resolution
Publication:
OrbiSIMS depth profiling of semiconductor materials-Useful yield and depth resolution
Date
2024
Journal article
https://doi.org/10.1116/6.0003821
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhou, Yundong
;
Franquet, Alexis
;
Spampinato, Valentina
;
Merkulov, Alex
;
Keenan, Michael R.
;
van der Heide, Paul
;
Trindade, Gustavo F.
;
Vandervorst, Wilfried
;
Gilmore, Ian S.
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Abstract
Description
Metrics
Views
400
since deposited on 2024-09-17
Acq. date: 2025-10-27
Citations
Metrics
Views
400
since deposited on 2024-09-17
Acq. date: 2025-10-27
Citations