Publication:

OrbiSIMS depth profiling of semiconductor materials-Useful yield and depth resolution

Date

2024

Journal article

https://doi.org/10.1116/6.0003821

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Author(s)

;

Franquet, Alexis

;

Spampinato, Valentina

;

;

Keenan, Michael R.

;

van der Heide, Paul

;

Trindade, Gustavo F.

;

Vandervorst, Wilfried

;

Gilmore, Ian S.

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Statistics

421 since deposited on 2024-09-17

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Acq. date: 2026-10-09