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Optimization of gate stack parameters towards 3D-SONOS application
Publication:
Optimization of gate stack parameters towards 3D-SONOS application
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Breuil, Laurent
;
Van den Bosch, Geert
;
Cacciato, Antonio
;
Date, Lucien
;
Kar, Gouri Sankar
;
Tang, Baojun
;
Arreghini, Antonio
;
Debusschere, Ingrid
;
Van Houdt, Jan
Journal
Microelectronic Engineering
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1961
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-10
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Metrics
Views
1961
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-10
Citations