Publication:

Optimization of gate stack parameters towards 3D-SONOS application

Date

2011
Journal article
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Author(s)

Breuil, Laurent  
;
Van den Bosch, Geert  
;
Cacciato, Antonio
;
Date, Lucien  
;
Kar, Gouri Sankar  
;
Tang, Baojun
;
Arreghini, Antonio  
;
Debusschere, Ingrid  
;
Van Houdt, Jan  

Journal

Microelectronic Engineering

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1962 since deposited on 2021-10-19
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