Publication:

Optimization of gate stack parameters towards 3D-SONOS application

Date

2011
Journal article
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dc.contributor.authorBreuil, Laurent
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorCacciato, Antonio
dc.contributor.authorDate, Lucien
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorTang, Baojun
dc.contributor.authorArreghini, Antonio
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDate, Lucien
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-19T12:40:16Z
dc.date.available2021-10-19T12:40:16Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18624
dc.source.beginpage1164
dc.source.endpage1167
dc.source.issue7
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Optimization of gate stack parameters towards 3D-SONOS application

dc.typeJournal article
dspace.entity.typePublication
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