Publication:

Modeling the Energy Consumption of Integrated Circuit Fab Infrastructure

Date

2024
Journal article
https://doi.org/10.1109/TSM.2024.3408926
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Author(s)

Liu, I-Yun  
;
Van Winckel, Laurent  
;
Boakes, Lizzie  
;
Garcia Bardon, Marie  
;
Rolin, Cedric  
;
Ragnarsson, Lars-Ake  

Journal

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

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170 since deposited on 2024-12-03
Acq. date: 2025-12-15

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170 since deposited on 2024-12-03
Acq. date: 2025-12-15

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