Publication:
Modeling the Energy Consumption of Integrated Circuit Fab Infrastructure
| dc.contributor.author | Liu, I-Yun | |
| dc.contributor.author | Van Winckel, Laurent | |
| dc.contributor.author | Boakes, Lizzie | |
| dc.contributor.author | Garcia Bardon, Marie | |
| dc.contributor.author | Rolin, Cedric | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.imecauthor | Liu, I-Yun | |
| dc.contributor.imecauthor | Van Winckel, Laurent | |
| dc.contributor.imecauthor | Boakes, Lizzie | |
| dc.contributor.imecauthor | Garcia Bardon, Marie | |
| dc.contributor.imecauthor | Rolin, Cedric | |
| dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
| dc.contributor.orcidimec | Liu, I-Yun::0009-0009-4281-9245 | |
| dc.contributor.orcidimec | Boakes, Lizzie::0000-0001-6204-4971 | |
| dc.contributor.orcidimec | Rolin, Cedric::0000-0001-5542-8504 | |
| dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
| dc.contributor.orcidimec | Garcia Bardon, Marie::0000-0001-5772-5406 | |
| dc.date.accessioned | 2025-06-04T08:37:01Z | |
| dc.date.available | 2024-12-03T16:44:53Z | |
| dc.date.available | 2025-06-04T08:37:01Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work was supported by the European Union through the Horizon Europe under Grant 101096772. | |
| dc.identifier.doi | 10.1109/TSM.2024.3408926 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44909 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 422 | |
| dc.source.endpage | 427 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | |
| dc.source.numberofpages | 6 | |
| dc.source.volume | 37 | |
| dc.title | Modeling the Energy Consumption of Integrated Circuit Fab Infrastructure | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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