Publication:
Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM
Date
| dc.contributor.author | De Gryse, O. | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.author | Lebedev, O. | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T16:45:41Z | |
| dc.date.available | 2021-10-14T16:45:41Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5191 | |
| dc.source.beginpage | 294 | |
| dc.source.endpage | 297 | |
| dc.source.journal | Physica B | |
| dc.source.volume | 308 | |
| dc.title | Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |