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Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution
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Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution
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Date
2010-11
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stoffels, Steve
;
Autizi, Enrico
;
Van Hoof, Rita
;
Severi, Simone
;
Puers, Bob
;
Witvrouw, Ann
;
Tilmans, Harrie
Journal
Journal of Applied Physics
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Views
1853
since deposited on 2021-10-18
2
last month
1
last week
Acq. date: 2025-12-15
Citations