Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution

dc.contributor.author	Stoffels, Steve
dc.contributor.author	Autizi, Enrico
dc.contributor.author	Van Hoof, Rita
dc.contributor.author	Severi, Simone
dc.contributor.author	Puers, Bob
dc.contributor.author	Witvrouw, Ann
dc.contributor.author	Tilmans, Harrie
dc.contributor.imecauthor	Stoffels, Steve
dc.contributor.imecauthor	Van Hoof, Rita
dc.contributor.imecauthor	Severi, Simone
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Tilmans, Harrie
dc.contributor.orcidimec	Tilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned	2021-10-18T22:01:02Z
dc.date.available	2021-10-18T22:01:02Z
dc.date.embargo	9999-12-31
dc.date.issued	2010-11
dc.identifier.issn	0021-8979
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/18044
dc.source.beginpage	84517
dc.source.issue	8
dc.source.journal	Journal of Applied Physics
dc.source.volume	108
dc.title	Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution
dc.type	Journal article
dspace.entity.type	Publication
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