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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
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Date
2014
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29781.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Choudhury, Faraz
;
de Marneffe, Jean-Francois
;
Baklanov, Mikhaïl
;
Nishi, Y.
;
Shohet, J.L
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1866
since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations
Metrics
Views
1866
since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations