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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
Publication:
Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
Date
2014
Meeting abstract
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29781.pdf
202.99 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Choudhury, Faraz
;
de Marneffe, Jean-Francois
;
Baklanov, Mikhaïl
;
Nishi, Y.
;
Shohet, J.L
Journal
Abstract
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1866
since deposited on 2021-10-22
Acq. date: 2025-10-25
Citations
Metrics
Views
1866
since deposited on 2021-10-22
Acq. date: 2025-10-25
Citations