Publication:
Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
Date
| dc.contributor.author | Choudhury, Faraz | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Nishi, Y. | |
| dc.contributor.author | Shohet, J.L | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T00:58:22Z | |
| dc.date.available | 2021-10-22T00:58:22Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23653 | |
| dc.source.beginpage | PS-TuP12 | |
| dc.source.conference | AVS 61st InternationalSymposium and Exhibition | |
| dc.source.conferencedate | 9/11/2014 | |
| dc.source.conferencelocation | Baltimore, MD USA | |
| dc.title | Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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