Publication:

Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates

Date

2018
Journal article
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Author(s)

Groven, Benjamin  
;
Nalin Mehta, Ankit  
;
Bender, Hugo  
;
Smets, Quentin  
;
Meersschaut, Johan  
;
Franquet, Alexis  
;
Conard, Thierry  
;
Nuytten, Thomas  
;
Verdonck, Patrick  
;
Vandervorst, Wilfried  
;
Heyns, Marc  
;
Radu, Iuliana  
;
Caymax, Matty  
;
Delabie, Annelies  

Journal

Journal of Vacuum Science and Technology A

Abstract

Description

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1897 since deposited on 2021-10-25
Acq. date: 2025-12-15

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1897 since deposited on 2021-10-25
Acq. date: 2025-12-15

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