Publication:

Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates

Date

2018
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Groven, Benjamin  
;
Nalin Mehta, Ankit  
;
Bender, Hugo  
;
Smets, Quentin  
;
Meersschaut, Johan  
;
Franquet, Alexis  
;
Conard, Thierry  
;
Nuytten, Thomas  
;
Verdonck, Patrick  
;
Vandervorst, Wilfried  
;
Heyns, Marc  
;
Radu, Iuliana  
;
Caymax, Matty  
;
Delabie, Annelies  

Journal

Journal of Vacuum Science and Technology A

Abstract

Description

Statistics

Views

1898 since deposited on 2021-10-25
Acq. date: 2026-03-17

Citations

Statistics

Views

1898 since deposited on 2021-10-25
Acq. date: 2026-03-17

Citations