Publication:

Self-aligned 8nm T2T as cell boundary in the middle-of-line

Date

2024

Proceedings Paper

https://doi.org/10.1109/IITC61274.2024.10732381

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Author(s)

Marien, Philippe

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Hermans, Yannick

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Choudhury, Subhobroto

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Decoster, Stefan

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Ulu Okudur, Fulya

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Jourdan, Nicolas

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Vega Gonzalez, Victor

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183 since deposited on 2025-03-06

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Acq. date: 2026-01-26