Publication:

Self-aligned 8nm T2T as cell boundary in the middle-of-line

Date

2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732381
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dc.contributor.authorMarien, Philippe
dc.contributor.authorHermans, Yannick
dc.contributor.authorChoudhury, Subhobroto
dc.contributor.authorKundu, Shreya
dc.contributor.authorDecoster, Stefan
dc.contributor.authorUlu Okudur, Fulya
dc.contributor.authorReddy, Naveen
dc.contributor.authorKenens, Bart
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorDelie, Gilles
dc.contributor.authorMarti, Giulio
dc.contributor.authorWu, C.
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorMarien, P. hilippe
dc.contributor.imecauthorHermans, Y.
dc.contributor.imecauthorChoudhury, S.
dc.contributor.imecauthorKundu, S.
dc.contributor.imecauthorDecoster, S.
dc.contributor.imecauthorOkudur, F. U.
dc.contributor.imecauthorReddy, N.
dc.contributor.imecauthorKenens, B.
dc.contributor.imecauthorJourdan, N.
dc.contributor.imecauthorDelie, G.
dc.contributor.imecauthorMarti, G.
dc.contributor.imecauthorWu, C.
dc.contributor.imecauthorGonzalez, V. V.
dc.contributor.imecauthorMurdoch, G.
dc.contributor.imecauthorPark, S.
dc.contributor.imecauthorTokei, Z.
dc.date.accessioned2025-03-06T20:46:37Z
dc.date.available2025-03-06T20:46:37Z
dc.date.issued2024
dc.identifier.doi10.1109/IITC61274.2024.10732381
dc.identifier.eisbn979-8-3503-8517-5
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45339
dc.publisherIEEE
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedate2024-06-03
dc.source.conferencelocationSan Jose
dc.source.numberofpages3
dc.title

Self-aligned 8nm T2T as cell boundary in the middle-of-line

dc.typeProceedings paper
dspace.entity.typePublication
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