Publication:

The IMEC Clean: implementation in advanced CMOS manufacturing

Date

2000
Journal article
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Author(s)

Meuris, Marc  
;
Arnauts, Sophia  
;
Cornelissen, Ingrid  
;
Kenis, Karine  
;
Lux, Marcel  
;
De Gendt, Stefan  
;
Mertens, Paul  
;
Teerlinck, Ivo
;
Vos, Rita  
;
Loewenstein, Lee
;
Heyns, Marc  

Journal

Semiconductor Fabtech

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1869 since deposited on 2021-10-14
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1869 since deposited on 2021-10-14
Acq. date: 2026-02-24

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