Publication:

The IMEC Clean: implementation in advanced CMOS manufacturing

Date

2000

Journal article

Simple item page Full metadata Statistics

Files

4581.pdf 942.91 KB

Author(s)

;

Arnauts, Sophia

;

Cornelissen, Ingrid

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;

;

De Gendt, Stefan

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;

;

;

Loewenstein, Lee

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Journal

Semiconductor Fabtech

Metrics

1866 since deposited on 2021-10-14

Acq. date: 2025-12-16