Publication:

The IMEC Clean: implementation in advanced CMOS manufacturing

Date

2000
Journal article
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dc.contributor.authorMeuris, Marc
dc.contributor.authorArnauts, Sophia
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorKenis, Karine
dc.contributor.authorLux, Marcel
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T13:23:11Z
dc.date.available2021-10-14T13:23:11Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4584
dc.source.beginpage295
dc.source.endpage299
dc.source.journalSemiconductor Fabtech
dc.source.volume11
dc.title

The IMEC Clean: implementation in advanced CMOS manufacturing

dc.typeJournal article
dspace.entity.typePublication
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