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Scalability of InGaAs nanowires demonstrating wire width down to 7nm and Lg down to 30nm fabricated on a 300mm Si platform

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2015 since deposited on 2021-10-23
1last month
Acq. date: 2026-10-12

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2015 since deposited on 2021-10-23
1last month
Acq. date: 2026-10-12

Citations