Publication:

Scalability of InGaAs nanowires demonstrating wire width down to 7nm and Lg down to 30nm fabricated on a 300mm Si platform

Date

2016
Proceedings Paper
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dc.contributor.authorZhou, Daisy
dc.contributor.authorWaldron, Niamh
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorSebaai, Farid
dc.contributor.authorMerckling, Clement
dc.contributor.authorEneman, Geert
dc.contributor.authorSioncke, Sonja
dc.contributor.authorNyns, Laura
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorMaes, Jan
dc.contributor.authorXie, Qi
dc.contributor.authorGivens, M
dc.contributor.authorTang, F
dc.contributor.authorJiang, X
dc.contributor.authorGuo, Weiming
dc.contributor.authorKunert, Bernardette
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDevriendt, Katia
dc.contributor.authorSibaja-Hernandez, Arturo
dc.contributor.authorFranco, Jacopo
dc.contributor.imecauthorZhou, Daisy
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorSibaja-Hernandez, Arturo
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-23T17:57:15Z
dc.date.available2021-10-23T17:57:15Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27674
dc.source.beginpage166
dc.source.conferenceSymposium on VLSI Technology
dc.source.conferencedate12/06/2016
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage167
dc.title

Scalability of InGaAs nanowires demonstrating wire width down to 7nm and Lg down to 30nm fabricated on a 300mm Si platform

dc.typeProceedings paper
dspace.entity.typePublication
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