Publication:

Selective growth of strained Ge on relaxed SiGe in shallow trench isolation for p-MOS FINFET

Date

2014

Meeting abstract

Simple item page Full metadata Statistics

Files

29850.pdf 32.28 KB

Author(s)

;

;

Witters, Liesbeth

;

Hikavyy, Andriy

;

Shimura, Yosuke

;

;

Richard, Olivier

;

;

Vandervorst, Wilfried

;

Collaert, Nadine

;

Statistics

1878 since deposited on 2021-10-22

Acq. date: 2026-02-25