Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects

dc.contributor.author	Schulze, Andreas
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Dathe, Andre
dc.contributor.author	Eyben, Pierre
dc.contributor.author	Ke, Xiaoxing
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-20T15:54:44Z
dc.date.available	2021-10-20T15:54:44Z
dc.date.embargo	9999-12-31
dc.date.issued	2012-07
dc.identifier.issn	0957-4484
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21481
dc.source.beginpage	305707
dc.source.issue	30
dc.source.journal	Nanotechnology
dc.source.volume	23
dc.title	Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects
dc.type	Journal article
dspace.entity.type	Publication
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