Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Stress Relaxation in Al-Si-Cu Thin Films and Lines
Publication:
Stress Relaxation in Al-Si-Cu Thin Films and Lines
Copy permalink
Date
1994
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Witvrouw, Ann
;
Proost, Joris
;
Deweerdt, Bruno
;
Roussel, Philippe
;
Maex, Karen
Journal
Abstract
Description
Statistics
Views
2063
since deposited on 2021-09-29
1
last month
Acq. date: 2026-02-24
Citations
Statistics
Views
2063
since deposited on 2021-09-29
1
last month
Acq. date: 2026-02-24
Citations