Publication:
Stress Relaxation in Al-Si-Cu Thin Films and Lines
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Proost, Joris | |
| dc.contributor.author | Deweerdt, Bruno | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Deweerdt, Bruno | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-29T12:53:33Z | |
| dc.date.available | 2021-09-29T12:53:33Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/463 | |
| dc.source.conference | MRS Fall Meeting : Symposium on Thin Films : Stresses and Mechanical Properties V; November 28 - December 2, 1994; Boston, Mass. | |
| dc.title | Stress Relaxation in Al-Si-Cu Thin Films and Lines | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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