Publication:
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
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1956 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
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Statistics
Views
1956 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
Citations