Publication:

Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions

Date

2004
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Author(s)

Paraschiv, Vasile  
;
Boullart, Werner  
;
Vanhaelemeersch, Serge  
;
Lisoni, Judit
;
Schwitters, Michael
;
Maes, David
;
Wouters, Dirk
;
Casella, P.
;
Zambrano, R.
;
Vecchio, G.
;
Van Autryve, Luc  

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1955 since deposited on 2021-10-15
Acq. date: 2026-01-25

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1955 since deposited on 2021-10-15
Acq. date: 2026-01-25

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