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Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Publication:
Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Besling, Wim
;
Young, Edward
;
Conard, Thierry
;
Zhao, Chao
;
Vandervorst, Wilfried
;
Caymax, Matty
;
De Gendt, Stefan
;
Heyns, Marc
;
Maes, Jos
;
Tuominen, Marko
;
Haukka, S.
Journal
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2004
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2004
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations