Publication:

Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Date

2001
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dc.contributor.authorBesling, Wim
dc.contributor.authorYoung, Edward
dc.contributor.authorConard, Thierry
dc.contributor.authorZhao, Chao
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaes, Jos
dc.contributor.authorTuominen, Marko
dc.contributor.authorHaukka, S.
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T16:37:21Z
dc.date.available2021-10-14T16:37:21Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5059
dc.source.conferenceSymposium Q of the E-MRS Spring Meeting 2001: High-k Gate Dielectrics; June 5-8, 2001; Strasbourg, France.
dc.source.conferencelocation
dc.title

Characterization of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

dc.typeOral presentation
dspace.entity.typePublication
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