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Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states
Publication:
Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kimura, Kenji
;
Nakajima, Kaoru
;
Zhao, Ming
;
Nohira, Hiroshi
;
Hattori, Takeo
;
Kobata, Masaaki
;
Ikenaga, Eiji
;
Kim, Jung Jin
;
Kobayashi, Keisuku
;
Conard, Thierry
;
Vandervorst, Wilfried
Journal
Surface and Interface Analysis
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1842
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1842
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations