Publication:

Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states

Date

2008

Journal article

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Author(s)

;

Nakajima, Kaoru

;

;

Nohira, Hiroshi

;

;

Kobata, Masaaki

;

;

;

Kobayashi, Keisuku

;

Conard, Thierry

;

Vandervorst, Wilfried

Journal

Surface and Interface Analysis

Statistics

1847 since deposited on 2021-10-17

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Acq. date: 2026-10-09