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Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states

Date

2008
Journal article
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dc.contributor.authorKimura, Kenji
dc.contributor.authorNakajima, Kaoru
dc.contributor.authorZhao, Ming
dc.contributor.authorNohira, Hiroshi
dc.contributor.authorHattori, Takeo
dc.contributor.authorKobata, Masaaki
dc.contributor.authorIkenaga, Eiji
dc.contributor.authorKim, Jung Jin
dc.contributor.authorKobayashi, Keisuku
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-17T08:00:30Z
dc.date.available2021-10-17T08:00:30Z
dc.date.issued2008
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13953
dc.source.beginpage423
dc.source.endpage426
dc.source.issue3_4
dc.source.journalSurface and Interface Analysis
dc.source.volume40
dc.title

Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states

dc.typeJournal article
dspace.entity.typePublication
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