Publication:

Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme

Date

2021

Proceedings Paper

https://doi.org/10.1109/IIRW53245.2021.9635605

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Author(s)

Parihar, Narendra

;

Arutchelvan, Goutham

;

;

Baudot, Sylvain

;

;

Demuynck, Steven

;

Arimura, Hiroaki

;

Ragnarsson, Lars-Ake

;

;

De Heyn, Vincent

;

Mercha, Abdelkarim

Journal

na

Metrics

1764 since deposited on 2022-03-25

Acq. date: 2025-12-15