Publication:

Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme

Date

2021
Proceedings Paper
https://doi.org/10.1109/iirw53245.2021.9635605
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Author(s)

Parihar, Narendra  
;
Arutchelvan, Goutham  
;
Franco, Jacopo  
;
Baudot, Sylvain  
;
Opdebeeck, Ann  
;
Demuynck, Steven  
;
Arimura, Hiroaki  
;
Ragnarsson, Lars-Ake  
;
Mitard, Jerome  
;
De Heyn, Vincent  
;
Mercha, Abdelkarim  

Journal

na

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1769 since deposited on 2022-03-25
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1769 since deposited on 2022-03-25
3last month
Acq. date: 2026-08-25

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