Publication:
Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme
| dc.contributor.author | Parihar, Narendra | |
| dc.contributor.author | Arutchelvan, Goutham | |
| dc.contributor.author | Franco, Jacopo | |
| dc.contributor.author | Baudot, Sylvain | |
| dc.contributor.author | Opdebeeck, Ann | |
| dc.contributor.author | Demuynck, Steven | |
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Ragnarsson, Lars-Ake | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | De Heyn, Vincent | |
| dc.contributor.author | Mercha, Abdelkarim | |
| dc.contributor.imecauthor | Parihar, Narendra | |
| dc.contributor.imecauthor | Arutchelvan, Goutham | |
| dc.contributor.imecauthor | Franco, Jacopo | |
| dc.contributor.imecauthor | Baudot, Sylvain | |
| dc.contributor.imecauthor | Opdebeeck, Ann | |
| dc.contributor.imecauthor | Demuynck, Steven | |
| dc.contributor.imecauthor | Arimura, Hiroaki | |
| dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | De Heyn, Vincent | |
| dc.contributor.imecauthor | Mercha, Abdelkarim | |
| dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
| dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Mercha, Abdelkarim::0000-0002-2174-6958 | |
| dc.date.accessioned | 2022-05-06T09:50:28Z | |
| dc.date.available | 2022-03-25T02:07:41Z | |
| dc.date.available | 2022-05-05T08:30:17Z | |
| dc.date.available | 2022-05-06T09:50:28Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IIRW53245.2021.9635605 | |
| dc.identifier.eisbn | 978-1-6654-1794-5 | |
| dc.identifier.issn | 1930-8841 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39514 | |
| dc.publisher | IEEE | |
| dc.source.beginpage | 29 | |
| dc.source.conference | IEEE International Integrated Reliability Workshop (IIRW) / 4th Reliability Experts Forum | |
| dc.source.conferencedate | OCT 04-29, 2021 | |
| dc.source.conferencelocation | Fallen Leaf Lake, Lake Tahoe, California - US | |
| dc.source.endpage | 32 | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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