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Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide
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Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, Anne
;
de Potter de ten Broeck, Muriel
;
Chamirian, Oxana
;
Lindsay, Richard
;
Demeurisse, Caroline
;
Vrancken, Christa
;
Maex, Karen
Journal
Microelectronic Engineering
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1795
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1795
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations