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Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide

Date

2002
Journal article
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dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorChamirian, Oxana
dc.contributor.authorLindsay, Richard
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVrancken, Christa
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-14T22:10:29Z
dc.date.available2021-10-14T22:10:29Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6528
dc.source.beginpage131
dc.source.endpage142
dc.source.issue1_4
dc.source.journalMicroelectronic Engineering
dc.source.volume64
dc.title

Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicide

dc.typeJournal article
dspace.entity.typePublication
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