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The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements
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The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements
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Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Witvrouw, Ann
;
Maex, Karen
;
De Ceuninck, Ward
;
Lekens, Geert
;
D'Haen, Jan
;
De Schepper, Luc
Journal
Microelectronics Reliability
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1984
since deposited on 2021-10-01
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1984
since deposited on 2021-10-01
1
last month
Acq. date: 2025-12-15
Citations