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Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence
Publication:
Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Arnauts, Sophia
;
Van Doorne, Patrick
;
Kenis, Karine
;
Onsia, Bart
;
Verstraeten, K.
;
Schaekers, Marc
;
Van Hoeymissen, Jan
;
Heyns, Marc
Journal
Spectrochimica Acta B
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1937
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1937
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations