Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping
Publication:
Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
21823.pdf
424.03 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Swerts, Johan
;
Gielis, Sven
;
Vereecke, Guy
;
Hardy, An
;
Dewulf, Daan
;
Adelmann, Christoph
;
Van Bael, Marlies
;
Van Elshocht, Sven
Journal
Applied Physics Letters
Abstract
Description
Metrics
Views
1881
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1881
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations