Publication:

Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping

Date

2011
Journal article
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dc.contributor.authorSwerts, Johan
dc.contributor.authorGielis, Sven
dc.contributor.authorVereecke, Guy
dc.contributor.authorHardy, An
dc.contributor.authorDewulf, Daan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-19T19:24:51Z
dc.date.available2021-10-19T19:24:51Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19855
dc.source.beginpage102904
dc.source.issue10
dc.source.journalApplied Physics Letters
dc.source.volume98
dc.title

Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping

dc.typeJournal article
dspace.entity.typePublication
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