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A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation
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Acq. date: 2026-02-24
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2 since deposited on 2021-10-27
Acq. date: 2026-02-24
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2002 since deposited on 2021-10-27
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Acq. date: 2026-02-24
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