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The influence of the epitaxial growth process parameters on layer characteristics and device performance in Si-passivated Ge pMOSFETs
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The influence of the epitaxial growth process parameters on layer characteristics and device performance in Si-passivated Ge pMOSFETs
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Caymax, Matty
;
Leys, Frederik
;
Mitard, Jerome
;
Martens, Koen
;
Yang, Lijun
;
Pourtois, Geoffrey
;
Vandervorst, Wilfried
;
Meuris, Marc
;
Loo, Roger
Journal
Journal of the Electrochemical Society
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1882
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Acq. date: 2025-12-10
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Metrics
Views
1882
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
Citations