Publication:
Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1921 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2025-12-12
Citations
Metrics
Views
1921 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2025-12-12
Citations