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Development of copper/dielectric hybrid fusion bonding with cavity for CMOS compatible wafer level hermetic packaging
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Development of copper/dielectric hybrid fusion bonding with cavity for CMOS compatible wafer level hermetic packaging
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Malainou, Antonia
;
Sabuncuoglu Tezcan, Deniz
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1866
since deposited on 2021-10-27
Acq. date: 2026-01-07
Citations
Metrics
Views
1866
since deposited on 2021-10-27
Acq. date: 2026-01-07
Citations