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Advanced RBS analysis of thin films in micro-electronics
Publication:
Advanced RBS analysis of thin films in micro-electronics
Date
2000
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Huygebaert, C.
;
Nauwelaerts, Sophie
;
Vandervorst, Wilfried
;
Kimura, K.
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1958
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1958
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations