Publication:
Advanced RBS analysis of thin films in micro-electronics
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Huygebaert, C. | |
| dc.contributor.author | Nauwelaerts, Sophie | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Kimura, K. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T12:42:09Z | |
| dc.date.available | 2021-10-14T12:42:09Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4151 | |
| dc.source.conference | 16th International Conference on the Application of Accelerators in Research and Industry - CAARI; 1-4 November 2000; Denton, TX | |
| dc.source.conferencelocation | ||
| dc.title | Advanced RBS analysis of thin films in micro-electronics | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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