Publication:

High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction

Date

2022

Proceedings Paper

https://doi.org/10.1109/IMW52921.2022.9779307

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Author(s)

Breuil, Laurent

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;

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Banerjee, Kaustuv

;

Arreghini, Antonio

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Van den Bosch, Geert

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Rosmeulen, Maarten

Journal

na

Statistics

1492 since deposited on 2022-10-30

Acq. date: 2026-02-27