Publication:
High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction
| dc.contributor.author | Breuil, Laurent | |
| dc.contributor.author | Nyns, Laura | |
| dc.contributor.author | Rachidi, Sana | |
| dc.contributor.author | Banerjee, Kaustuv | |
| dc.contributor.author | Arreghini, Antonio | |
| dc.contributor.author | Bastos, Joao | |
| dc.contributor.author | Ramesh, Siva | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Breuil, Laurent | |
| dc.contributor.imecauthor | Nyns, Laura | |
| dc.contributor.imecauthor | Rachidi, Sana | |
| dc.contributor.imecauthor | Banerjee, Kaustuv | |
| dc.contributor.imecauthor | Arreghini, Antonio | |
| dc.contributor.imecauthor | Bastos, Joao | |
| dc.contributor.imecauthor | Ramesh, Siva | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Rosmeulen, Maarten | |
| dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
| dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
| dc.contributor.orcidimec | Rachidi, Sana::0000-0001-8581-8597 | |
| dc.contributor.orcidimec | Banerjee, Kaustuv::0000-0001-8003-6211 | |
| dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
| dc.contributor.orcidimec | Bastos, Joao::0000-0002-8877-9850 | |
| dc.contributor.orcidimec | Ramesh, Siva::0000-0002-8473-7258 | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
| dc.date.accessioned | 2023-01-03T10:55:09Z | |
| dc.date.available | 2022-10-30T02:54:59Z | |
| dc.date.available | 2023-01-03T10:55:09Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | This work has been funded by Imec's Industrial Affiliation Program on Storage Memory devices. | |
| dc.identifier.doi | 10.1109/IMW52921.2022.9779307 | |
| dc.identifier.eisbn | 978-1-6654-9947-7 | |
| dc.identifier.issn | 2330-7978 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40642 | |
| dc.publisher | IEEE | |
| dc.source.beginpage | 144 | |
| dc.source.conference | 14th IEEE International Memory Workshop (IMW) | |
| dc.source.conferencedate | MAR 15-18, 2022 | |
| dc.source.conferencelocation | Dresden | |
| dc.source.endpage | 147 | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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