Publication:
Atomic layer deposition of Gd-doped HfO2 thin films
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1998 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2025-12-08
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Metrics
Views
1998 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2025-12-08
Citations