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Atomic layer deposition of Gd-doped HfO2 thin films
Publication:
Atomic layer deposition of Gd-doped HfO2 thin films
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Adelmann, Christoph
;
Tielens, Hilde
;
Dewulf, Daan
;
Hardy, An
;
Pierreux, Dieter
;
Swerts, Johan
;
Rosseel, Erik
;
Shi, Xiaoping
;
Van Bael, Marlies
;
Kittl, Jorge
;
Van Elshocht, Sven
Journal
Journal of the Electrochemical Society
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2001
since deposited on 2021-10-18
3
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Acq. date: 2026-02-27
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Statistics
Views
2001
since deposited on 2021-10-18
3
last month
Acq. date: 2026-02-27
Citations