Publication:

Record Ion/Ioff performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability

Date

2008
Proceedings Paper
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Author(s)

Mitard, Jerome  
;
De Jaeger, Brice  
;
Leys, Frederik
;
Hellings, Geert  
;
Martens, Koen  
;
Eneman, Geert  
;
Brunco, David
;
Loo, Roger  
;
Shamiryan, Denis
;
Vandeweyer, Tom  
;
Winderickx, Gillis  
;
Vrancken, Evi  
;
De Meyer, Kristin  
;
Caymax, Matty  
;
Pantisano, Luigi
;
Meuris, Marc  
;
Heyns, Marc  

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