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Physical characterization of ultra-thin high k dielectrics
Publication:
Physical characterization of ultra-thin high k dielectrics
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Date
2007-02
Book Chapter
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Bender, Hugo
;
Vandervorst, Wilfried
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1871
since deposited on 2021-10-16
Acq. date: 2026-01-08
Citations
Metrics
Views
1871
since deposited on 2021-10-16
Acq. date: 2026-01-08
Citations